P386 – Exit Slit Unit HERMES Soleil
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2014
Installation site
HERMES beamline at the synchrotron radiation source SOLEIL, France
Design Features
- Double slit mechanism – vertically and horizontally defining slits.
-
Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- OFHC slit blades.
-
Motorized and encoded translation of both slits transversal to the beam axis.
- Motorized slit unit translation along beam axis.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 0.8 µm over 10 mm edge length.
- Straightness smaller than 0.5 µm over 10 mm edgle length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Translation along beam axis
Range
± 100 mm
Parasitic roll
< 100 µrad
Repeatability
< 10 µm
Resolution (design value)
1 µm /step (full step at actuator)
Horizontally defining slit (HDS)
Slit blades
Material
OFHC
Straightness
< 0.15 µm over 10 mm (1σ)
Parallelism
-0.07 µm /mm
(15 µm slit opening)
-0.07 µm /mm
(25 µm slit opening)
-0.12 µm /mm
(50 µm slit opening)
Slit opening
Range
2 µm to 6.7 mm
Repeatability
± 0.02 µm
(up to 345 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Slit translation
Range
-1.8 mm to +9.2 mm
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Vertically defining slit (VDS)
Slit blades
Material
OFHC
Straightness
< 0.10 µm over 10 mm (1σ)
Parallelism
-0.04 µm /mm
(15 µm slit opening)
-0.03 µm /mm
(25 µm slit opening)
-0.02 µm /mm
(50 µm slit opening)
Slit opening
Range
5.5 µm to 6.7 mm
Repeatability
± 0.08 µm
(up to 315 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Slit translation
Range
-3.2 mm to +7.5 mm
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Performance Test Results
Slit width calibration (HDS)
Slit opening repeatability (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit width deviation upon translation (HDS)
Slit width calibration (VDS)
Slit opening repeatability (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit width deviation upon translation (VDS)
