P373 – Exit Slit Unit BL5 SSRL
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2013
Installation site
BL5 beamline at synchrotron radiation source SSRL, USA
Design Features
- One vertically defining slit unit.
- Motorized and encoded slit opening, symmetric opening, non-linear opening characteristics.
-
Passive cooling of the OFHC slit blades.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 0.35 µm over 10 mm edge length.
- Straightness smaller than 0.1 µm over 7 mm edge length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Vertically defining slit (VDS)
Slit blades
Material
OFHC
Straightness
< 0.10 µm over 7 mm (1σ)
Parallelism
0.03 µm /mm
(5 µm slit opening)
0.003 µm /mm
(10 µm slit opening)
0.03 µm /mm
(25 µm slit opening)
0.03 µm /mm
(50 µm slit opening)
Slit opening
Range
5 µm to 5.6 mm
Repeatability
± 0.03 µm
(up to 300 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Performance Test Results
Slit width calibration (VDS)
Slit opening repeatability (VDS)
Slit blade parallelism (VDS)
Slit blade parallelism (VDS)
Slit blade parallelism (VDS)
Slit opening stability (VDS)
